Waferpedia

Tool family

Laurell EDC-650-8

LaurellSpin processor1 entry

The Laurell EDC-650-8 is a station-mounted spin processor that accommodates up to 200 mm wafers and 7 in x 7 in substrates.

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Models in this family

  1. EDC-650-8

    The Laurell EDC-650-8 is a station-mounted spin processor that accommodates up to 200 mm wafers and 7 in x 7 in substrates.

    Cited variants

    DesignationGenerationVintageChangesSource
    EDC-650-8B———web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org