Waferpedia

Laurell

EDC-650-8

Spin processor200mmLaurell EDC-650-8 family
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EDC-650-8 — web.archive.org
Fig. 01EDC-650-8web.archive.org[1]

Wafer size

200mm

Power

95 to 240 VAC, 47/63 Hz, ~300 W[2]

Vacuum

12,000 RPM with vacuum hold-down[2]

What is it?

The Laurell EDC-650-8 is a 650-series EDC spin processor described as compact and station mounted. The sources state that it accommodates up to 200 mm wafers and 7 in x 7 in (178 mm x 178 mm) substrates, has a 12,000 RPM capability with vacuum hold-down, and is recommended for 3,000 RPM and non-vacuum chucks.

What can it run?

Process applications and technology nodes documented for this tool.

  • Etch
  • Develop
  • Clean
  • Solvent rinse
  • Aqueous rinse

What do the numbers mean?

Power & electrical1

Power
95 to 240 VAC, 47/63 Hz, ~300 W[2]
Accurate?

Vacuum & pumping2

Maximum speed capability
12,000 RPM with vacuum hold-down[2]
Accurate?
Recommended chuck type
non-vacuum chucks[2]
Accurate?

Wafer handling2

Wafer capacity
up to 200 mm wafers[2]
Accurate?
Substrate capacity
7 in x 7 in (178 mm x 178 mm) substrates[2]
Accurate?

Configuration & options4

Model
EDC-650-8[2]
Accurate?
Machine type
Spin Processor[2]
Accurate?
Mounting
Station Mounted[2]
Accurate?
Recommended speed
3,000 RPM[2]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
EDC-650-8B———web.archive.org[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Maximum speed capability12,000 RPM with vacuum hold-down[2]
  • Recommended chuck typenon-vacuum chucks[2]
  • Power95 to 240 VAC, 47/63 Hz, ~300 W[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the EDC-650-8 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EDC-650-8 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the EDC-650-8 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the EDC-650-8 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the EDC-650-8 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the EDC-650-8 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]web.archive.org — web.archive.orgweb.archive.org
  3. [3]web.archive.org — web.archive.orgweb.archive.org
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Last updated Jul 29, 2026.