Tool family
The Laurell EDC-HL-15 B is a 650-series EDC spin processor that accommodates up to 300 mm wafers and 9" × 9" substrates.
The Laurell EDC-HL-15 B is a 650-series EDC spin processor that accommodates up to 300 mm wafers and 9" × 9" substrates.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| EDC-HL-15 B | 650-series | — | Base designation stated on the source page. | web.archive.org[1] |
| EDC-HL-23B | 650-series | — | Listed by the source as another model under the same model selection area. | web.archive.org[1] |
| EDC-HL-8B | 650-series | — | Listed by the source as another model under the same model selection area. | web.archive.org[1] |