Waferpedia

Tool family

Laurell EDC-HL-15

The Laurell EDC-HL-15 B is a 650-series EDC spin processor that accommodates up to 300 mm wafers and 9" × 9" substrates.

Models in this family

  1. EDC-HL-15650-series

    The Laurell EDC-HL-15 B is a 650-series EDC spin processor that accommodates up to 300 mm wafers and 9" × 9" substrates.

    Cited variants

    DesignationGenerationVintageChangesSource
    EDC-HL-15 B650-seriesBase designation stated on the source page.web.archive.org[1]
    EDC-HL-23B650-seriesListed by the source as another model under the same model selection area.web.archive.org[1]
    EDC-HL-8B650-seriesListed by the source as another model under the same model selection area.web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org