Laurell
EDC-HL-15
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- Etch
- Develop
- Clean
- solvent or aqueous rinse
What do the numbers mean?
Power & electrical1
Vacuum & pumping2
Wafer handling1
Configuration & options3
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| EDC-HL-15 B | 650-series | — | Base designation stated on the source page. | web.archive.org[1] |
| EDC-HL-23B | 650-series | — | Listed by the source as another model under the same model selection area. | web.archive.org[1] |
| EDC-HL-8B | 650-series | — | Listed by the source as another model under the same model selection area. | web.archive.org[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the EDC-HL-15 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EDC-HL-15 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the EDC-HL-15 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the EDC-HL-15 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the EDC-HL-15 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the EDC-HL-15 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
Last updated Jul 29, 2026.
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The Laurell H6-15 is a compact HL Series spin coater designed for glove box use and specified to accommodate up to ø 300mm wafers and 9" × 9" substrates.
The Laurell WS-650-15 is a station-mounted spin coater in the 650-series that accommodates up to 300mm wafers and 9" × 9" substrates and reaches a maximum rotational speed of 12,000 RPM.
Laurell's WS-400-6NPP is a 400-series spin coater with a 400-series process controller, a 1.75" vacuum chuck, and support for wafers up to 150 mm.
The Laurell EDC-HL-23 B is a compact EDC spin processor with capacity for up to 150 mm wafers and 5 in x 5 in substrates.
