Tool family

Laurell EDC-HL-23

The Laurell EDC-HL-23 B is a compact EDC spin processor with capacity for up to 150 mm wafers and 5 in x 5 in substrates.

Models in this family

EDC-HL-23650-series
The Laurell EDC-HL-23 B is a compact EDC spin processor with capacity for up to 150 mm wafers and 5 in x 5 in substrates.
Cited variants
Designation Generation Vintage Changes Source
EDC-HL-23 B 650-series — — web.archive.org^[1]

Designation	Generation	Vintage	Changes	Source
EDC-HL-23 B	650-series	—	—	web.archive.org^[1]

Sources (1)Every fact above is drawn from these public sources