Waferpedia

Tool family

Laurell EDC-HL-8

The Laurell EDC-HL-8 B is a compact EDC spin processor that accommodates up to 200 mm wafers and 7 in × 7 in substrates.

Models in this family

  1. The Laurell EDC-HL-8 B is a compact EDC spin processor that accommodates up to 200 mm wafers and 7 in × 7 in substrates.

    Cited variants

    DesignationGenerationVintageChangesSource
    EDC-HL-8 BDescribed as the EDC-HL-8 B spin processor model; no other changes relative to a base model are stated in the source.web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org