Tool family
The Laurell EDC-HL-8 B is a compact EDC spin processor that accommodates up to 200 mm wafers and 7 in × 7 in substrates.
The Laurell EDC-HL-8 B is a compact EDC spin processor that accommodates up to 200 mm wafers and 7 in × 7 in substrates.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| EDC-HL-8 B | — | — | Described as the EDC-HL-8 B spin processor model; no other changes relative to a base model are stated in the source. | web.archive.org[1] |