Waferpedia

Tool family

Laurell H6-23

LaurellSpin coater1 entry

The Laurell H6-23 is a compact HL Series spin coater for wafers and substrates, with a maximum rotational speed of 12,000 RPM.

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Models in this family

  1. H6-23650-series HL

    The Laurell H6-23 is a compact HL Series spin coater for wafers and substrates, with a maximum rotational speed of 12,000 RPM.