Laurell

H6-23

Spin coater 150mm650-series HLLaurell H6-23 family

Research Quality: 40% complete

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H6-23 — web.archive.org — Fig. 01H6-23web.archive.org^[1]

Wafer size

150mm

Power

95 to 240VAC, 47/63HZ, ~300 Watts^[1]

What is it?

The Laurell H6-23 spin coater is described as a compact HL Series system designed for glove box use. It accommodates up to ø 150mm wafers and 5" × 5" (127mm × 127mm) substrates, and the listed maximum rotational speed is 12,000 RPM based on a ø 100mm silicon wafer.

What can it run?

Process applications and technology nodes documented for this tool.

Glove box use
Coating
Etching
Developing
Rinsing-Drying
Cleaning

What do the numbers mean?

Power & electrical1

Power: 95 to 240VAC, 47/63HZ, ~300 Watts^[1]

Wafer handling3

Maximum rotational speed: 12,000 RPM (based on a ø 100mm silicon wafer)^[1]
Wafer capacity: Up to ø 150mm wafers^[1]
Substrate capacity: 5" × 5" (127mm × 127mm) substrates^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Power95 to 240VAC, 47/63HZ, ~300 Watts^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the H6-23 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the H6-23 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the H6-23 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the H6-23 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the H6-23 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the H6-23 is not on record.
Answerable by: an OEM datasheet or a fab qualification report