Waferpedia

Tool family

Laurell Lz-23

LaurellSpin coater1 entry

The Laurell Lz-23 B is a compact 650-series spin coater that accommodates up to 150 mm wafers and 5 in × 5 in substrates.

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Models in this family

  1. Lz-23

    The Laurell Lz-23 B is a compact 650-series spin coater that accommodates up to 150 mm wafers and 5 in × 5 in substrates.

    Cited variants

    DesignationGenerationVintageChangesSource
    Lz-23 B———web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org