Laurell

Lz-23

Research Quality: 40% complete

What is it?

The Laurell Lz-23 B spin coater is described as a compact 650-series coater system with a maximum rotational speed of 12,000 RPM based on a 100 mm silicon wafer. The source states that it accommodates up to 150 mm wafers and 5 in × 5 in (127 mm × 127 mm) substrates, and lists controller, housing, safety, facility, and process information for the model line.

What can it run?

Process applications and technology nodes documented for this tool.

Solvent-based processing
Base-based processing
Acid-based processing
Coating
Etching
Developing
Rinsing-drying
Cleaning

What do the numbers mean?

Power & electrical1

Power: 95 to 240 VAC, 47/63 Hz, approximately 300 W^[1]

Vacuum & pumping1

Vacuum suggestion: 25–28 inches Hg with a flow volume of 4.5 SCFM at 0 inches Hg^[1]

Wafer handling3

Maximum wafer size: Up to 150 mm wafers^[1]
Substrate size: 5 in × 5 in (127 mm × 127 mm)^[1]
Maximum rotational speed: 12,000 RPM (based on a 100 mm silicon wafer)^[1]

Control & software1

Process controller: 650-series process controller^[1]

Dimensions & facilities1

Nitrogen/CDA process/seal purge: 60–70 PSIG (4–5 bar)^[1]

Configuration & options1

Series: 650-series^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
Lz-23 B	—	—	—	web.archive.org^[1]

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Power95 to 240 VAC, 47/63 Hz, approximately 300 W^[1]
Vacuum suggestion25–28 inches Hg with a flow volume of 4.5 SCFM at 0 inches Hg^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Lz-23 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Lz-23 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Lz-23 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Lz-23 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Lz-23 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Lz-23 are on record.
Answerable by: an OEM parts catalog or a service engineer