Tool family
The Laurell WS-650-15 is a station-mounted spin coater in the 650-series that accommodates up to 300mm wafers and 9" × 9" substrates and reaches a maximum rotational speed of 12,000 RPM.
The Laurell WS-650-15 is a station-mounted spin coater in the 650-series that accommodates up to 300mm wafers and 9" × 9" substrates and reaches a maximum rotational speed of 12,000 RPM.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| WS-650-15 B | 650-series | — | Described as the station-mounted WS-650-15 B spin coater. | web.archive.org[1] |
| WS-650-15B | 650-series | — | Described as the station-mounted WS-650-15B spin coater. | web.archive.org[2] |
| WS-650-15 B | 650-series | — | Described as the station-mounted WS-650-15 B spin coater. | web.archive.org[3] |