Waferpedia

Tool family

Laurell WS-650-15

The Laurell WS-650-15 is a station-mounted spin coater in the 650-series that accommodates up to 300mm wafers and 9" × 9" substrates and reaches a maximum rotational speed of 12,000 RPM.

Models in this family

  1. WS-650-15650-series

    The Laurell WS-650-15 is a station-mounted spin coater in the 650-series that accommodates up to 300mm wafers and 9" × 9" substrates and reaches a maximum rotational speed of 12,000 RPM.

    Cited variants

    DesignationGenerationVintageChangesSource
    WS-650-15 B650-seriesDescribed as the station-mounted WS-650-15 B spin coater.web.archive.org[1]
    WS-650-15B650-seriesDescribed as the station-mounted WS-650-15B spin coater.web.archive.org[2]
    WS-650-15 B650-seriesDescribed as the station-mounted WS-650-15 B spin coater.web.archive.org[3]

Sources

Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]web.archive.orgweb.archive.org
  3. [3]web.archive.orgweb.archive.org