Laurell
WS-650-15
Wafer size
300mm
Power
95 to 240VAC, 47/63HZ, ~300 Watts[1]
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- Coating
- Etching
- Developing
- Rinsing-Drying
- Cleaning
- Solvent-based processing
- Base-based processing
- Acid-based processing
What do the numbers mean?
Power & electrical1
Wafer handling3
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| WS-650-15 B | 650-series | — | Described as the station-mounted WS-650-15 B spin coater. | web.archive.org[1] |
| WS-650-15B | 650-series | — | Described as the station-mounted WS-650-15B spin coater. | web.archive.org[2] |
| WS-650-15 B | 650-series | — | Described as the station-mounted WS-650-15 B spin coater. | web.archive.org[3] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Power95 to 240VAC, 47/63HZ, ~300 Watts[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the WS-650-15 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WS-650-15 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the WS-650-15 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the WS-650-15 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the WS-650-15 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the WS-650-15 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]web.archive.org — web.archive.orgweb.archive.org
Last updated Jul 29, 2026.
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