Waferpedia

Tool family

Laurell WS-650-23

LaurellSpin coater1 entry

The Laurell WS-650-23 is a station-mounted spin coater in the WS-650 series that accommodates up to ø 150 mm wafers and 5" × 5" substrates.

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Models in this family

  1. WS-650-23

    The Laurell WS-650-23 is a station-mounted spin coater in the WS-650 series that accommodates up to ø 150 mm wafers and 5" × 5" substrates.

    Cited variants

    DesignationGenerationVintageChangesSource
    WS-650-23 B———web.archive.org[1]
    WS-650-23B———web.archive.org[2]

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]web.archive.orgweb.archive.org