Laurell

WS-650-23

Spin coater 150mm Laurell WS-650-23 family

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WS-650-23 — web.archive.org — Fig. 01WS-650-23web.archive.org^[1]

Wafer size

150mm

Power

95 to 240VAC, 47/63HZ, ~300 Watts^[1]

What is it?

The Laurell WS-650-23 is described as a compact, station-mounted 650-series spin coater. The source states that it accommodates up to ø 150 mm wafers and 5" × 5" (127 mm × 127 mm) substrates, and that the series features a maximum rotational speed of 12,000 RPM based on a ø 100 mm silicon wafer.

What can it run?

Process applications and technology nodes documented for this tool.

Solvent, base, or acid-based processing
Coating
Etching
Developing
Rinsing-drying
Cleaning
MEMS spray coating development

Why won't it start?

Documented failure modes, common issues, and field considerations.

Laurell recommends single-use only due to known material conflicts.
Photoresist and developer can cause cross-contamination.
SC-1 and SC-2 create NH4Cl, described as a hazardous inhalation risk.

What do the numbers mean?

Power & electrical1

Power: 95 to 240VAC, 47/63HZ, ~300 Watts^[1]

Vacuum & pumping1

Vacuum: 25–28 inches Hg; suggested flow volume 4.5 SCFM (0.127 cubic meters/minute) at 0 inches Hg^[1]

Wafer handling3

Wafer capacity: Up to ø 150 mm wafers^[1]
Substrate capacity: 5" × 5" (127 mm × 127 mm) substrates^[1]
Maximum rotational speed: 12,000 RPM (based on a ø 100 mm silicon wafer)^[1]

Dimensions & facilities1

Required N2 process/seal purge: 60–70 PSIG (4–5 bar) of Nitrogen/CDA^[1]

Configuration & options3

Model: WS-650-23 B Spin Coater^[1]
Mounting: Station Mounted^[1]
Processes supported: Coating, Etching, Developing, Rinsing-Drying and Cleaning^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
WS-650-23 B	—	—	—	web.archive.org^[1]
WS-650-23B	—	—	—	web.archive.org^[2]

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Power95 to 240VAC, 47/63HZ, ~300 Watts^[1]
Vacuum25–28 inches Hg; suggested flow volume 4.5 SCFM (0.127 cubic meters/minute) at 0 inches Hg^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the WS-650-23 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WS-650-23 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the WS-650-23 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the WS-650-23 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the WS-650-23 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the WS-650-23 are on record.
Answerable by: university cleanroom staff or an OEM application specialist