Waferpedia

Tool family

Laurell WS-650-8

LaurellSpin coater1 entry

The Laurell WS-650-8B is a compact 650-series spin coater with a maximum rotational speed of 12,000 RPM and support for wafers up to 200 mm.

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Models in this family

  1. WS-650-8

    The Laurell WS-650-8B is a compact 650-series spin coater with a maximum rotational speed of 12,000 RPM and support for wafers up to 200 mm.

    Cited variants

    DesignationGenerationVintageChangesSource
    WS-650-8B———web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org