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Laurell

WS-650-8

Spin coater200mmLaurell WS-650-8 family
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WS-650-8 — web.archive.org
Fig. 01WS-650-8web.archive.org[1]

What is it?

The Laurell WS-650-8B is a 650-series spin coater described as compact and packed with advanced features. The sources state that it accommodates up to 200 mm wafers and 7 in x 7 in substrates, and that its maximum rotational speed is 12,000 RPM based on a 100 mm silicon wafer.

What can it run?

Process applications and technology nodes documented for this tool.

  • Coating
  • Etching
  • Developing
  • Rinsing-drying
  • Cleaning

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • The source says Laurell recommends single-use only due to known material conflicts.
  • The source gives examples of photoresist/developer cross-contamination and SC-1/SC-2 creating NH4Cl as a hazardous inhalation risk.

What do the numbers mean?

Power & electrical1

Power requirement
95 to 240 VAC, 47/63 Hz, approximately 300 W[1]
Accurate?

Vacuum & pumping1

Vacuum suggestion
25 to 28 inches Hg; 4.5 SCFM at 0 inches Hg[1]
Accurate?

Wafer handling3

Wafer capacity
Up to 200 mm wafers[1]
Accurate?
Substrate capacity
Up to 7 in x 7 in (178 mm x 178 mm) substrates[1]
Accurate?
Basis for max speed rating
Based on a 100 mm silicon wafer[1]
Accurate?

Control & software1

Process controller
650-series process controller with robust microprocessor and accompanying PC software[1]
Accurate?

Dimensions & facilities1

Nitrogen/CDA process/seal purge
60 to 70 PSIG (4 to 5 bar)[1]
Accurate?

Configuration & options4

Product type
Spin coater[1]
Accurate?
Series
650-series[1]
Accurate?
Maximum rotational speed
12,000 RPM[1]
Accurate?
Applications
Coating, etching, developing, rinsing-drying, and cleaning[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
WS-650-8B———web.archive.org[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Power requirement95 to 240 VAC, 47/63 Hz, approximately 300 W[1]
  • Vacuum suggestion25 to 28 inches Hg; 4.5 SCFM at 0 inches Hg[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the WS-650-8 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WS-650-8 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the WS-650-8 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the WS-650-8 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the WS-650-8 are on record.

    Answerable by: an OEM parts catalog or a service engineer

  • No publicly hosted manuals, SOPs, or datasheets for the WS-650-8 are on record.

    Answerable by: university cleanroom staff or an OEM application specialist

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]web.archive.org — web.archive.orgweb.archive.org
  3. [3]web.archive.org — web.archive.orgweb.archive.org
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Last updated Jul 29, 2026.

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