Waferpedia

Tool family

Laurell WS-650MZ

LaurellSpinner1 entry

Laurell WS-650MZ is listed as a spinner in Stanford Nano Shared Facilities’ Flexible Cleanroom equipment inventory.

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Models in this family

  1. The Laurell WS-650MZ is a spin coater used for spin coating resist and other materials on substrates. The Laurell WS-650Mz-23NPPB variant has a 0–12,000 rpm rotation speed range and supports round substrates from 10–150 mm and square substrates up to 125 × 125 mm.