Waferpedia

Tool family

Laurell WS-750-23 B

The Laurell WS-750-23 B is a 750-series spin coater that processes substrates up to 150mm (5" x 5") with a maximum speed of 12000 rpm and offers tabletop, in-deck, or on-deck mounting options.

Models in this family

  1. The Laurell WS-750-23 B is a 750-series spin coater that processes substrates up to 150mm (5" x 5") with a maximum speed of 12000 rpm and offers tabletop, in-deck, or on-deck mounting options.