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Laurell

WS-750-23 B

Resist ProcessingLaurell WS-750-23 B family
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The Laurell WS-750-23 B is a 750-series spin coater that handles maximum substrate sizes of 150mm (5" x 5"). The Laurell WS-750-23 B offers a maximum spindle speed of 12000 rpm. The Laurell WS-750-23 B is available in tabletop, in-deck, or on-deck mounting options.[1]

LaurellWS-750-23 B
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What it is

The Laurell WS-750-23 B is a spin coater for resist processing.[1]

The WS-750-23 B belongs to Laurell's 750-series and accepts a maximum substrate size of 150 mm.[1]

How it works

The WS-750-23 B has a maximum rotational speed of 12000 rpm and supports tabletop, in-deck, and on-deck mounting options.[1]

Where it fits in the process flow

General reference — not yet source-verified

A spin coater sits in the front end of a lithography or coating flow, after substrate preparation and before soft bake and exposure or other downstream processing steps.

A resist processing spin coater is used on flat substrates that require controlled thin-film coating before later patterning or curing steps.

Applications

General reference — not yet source-verified

Spin coating is used for photoresist, polymer coatings, and other liquid films that must dry or cure as thin, uniform layers on a substrate.

What do the numbers mean?

Wafer handling2

Max. Substrate Size
ø 150mm (5" × 5")[1]
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Maximum Substrate Size
Ø150mm (5" x 5")[1]
Accurate?

Configuration & options6

Model Type
Spin Coater[1]
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Series
750-series[1]
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Max. RPM
12000 rpm[1]
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Mounting Options
Tabletop, In-Deck, On-deck[1]
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Type
Spin Coater[1]
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Maximum Speed
12000 rpm[1]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the maximum substrate size for the WS-750-23 B?

The maximum substrate size for the WS-750-23 B is 150 mm.[1]

What mounting options are available for the WS-750-23 B?

The WS-750-23 B supports tabletop, in-deck, and on-deck mounting.[1]

Not publicly documented

The following facts about the WS-750-23 B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WS-750-23 B are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the WS-750-23 B are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the WS-750-23 B are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the WS-750-23 B are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the WS-750-23 B is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]images.laurell.com — images.laurell.comimages.laurell.com
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Last updated Oct 9, 2026.

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