Waferpedia

Tool family

Leybold Boxer

Leybold2 entries
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Models in this family

  1. Boxer 700 AR

    Leybold Boxer 700 AR Machine is a refurbished machine described with a turbo pump, gun, ion and thermal source, 2-way crystal head, Polycold, and 60 lens capacity per cycle.

  2. Boxer Pro

    Leybold Boxer Pro is a coater with an HPE 6 Eelectron gun, Mark II ion gun, and a substrate holder configuration with 3 segments on a calotte.

All entries

  1. Boxer 700 ARLeybold

    Leybold Boxer 700 AR Machine is a refurbished machine described with a turbo pump, gun, ion and thermal source, 2-way crystal head, Polycold, and 60 lens capacity per cycle.

    7 specs
  2. Boxer ProLeybold

    Leybold Boxer Pro is a coater with an HPE 6 Eelectron gun, Mark II ion gun, and a substrate holder configuration with 3 segments on a calotte.

    4 specs