Waferpedia

Tool family

Logitech EP1

LogitechCMP1 entry

EP1 is a Logitech chemical mechanical polishing cloth and pad product suitable for a wide range of applications, including oxide, nitride, and copper.

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Models in this family

  1. EP1

    EP1 is a Logitech chemical mechanical polishing cloth and pad product suitable for a wide range of applications, including oxide, nitride, and copper.