Waferpedia

Tool family

Nanometrics 210

The Nanometrics 210 is listed as a film thickness measurement tool and a scanning UV Nanospec/DUV microspectrophotometer in facility equipment inventories.

Models in this family

  1. The Nanometrics 210 is a film thickness measurement system capable of measuring film thicknesses up to 50 micrometers (500,000 angstroms) with a typical measurement time of 2.5 seconds.

    Cited variants

    DesignationGenerationVintageChangesSource
    Nanometrics 210 XPListed as a scanning UV Nanospec/DUV microspectrophotometer.nanolab.berkeley.edu[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]nanolab.berkeley.edunanolab.berkeley.edu