Nanometrics
The system can measure films in a thickness range from 100 Å to 500,000 Å. Typical measurement time is 2.5 seconds. Spot size can be 50 µm with a 5x objective, 25 µm with a 10x objective, or 6.5 µm with a 40x objective.[3]
The Nanometrics 210 is used in semiconductor fabrication for in-line or off-line measurement of film thickness after deposition or other processing steps. Feedback from such measurements is used to adjust process parameters to maintain target thicknesses.
Process applications and technology nodes documented for this tool.
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Nanometrics 210 XP | — | — | Listed as a scanning UV Nanospec/DUV microspectrophotometer. | nanolab.berkeley.edu[2] |
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The Nanometrics 210 measures films from 100 Å to 500,000 Å.[3]
Typical measurement time is 2.5 seconds.[3]
Spot sizes include 50 µm with 5x objective, 25 µm with 10x objective, and 6.5 µm with 40x objective.[3]
The system can measure oxide on silicon, nitride on silicon, negative resist on silicon, polysilicon on oxide, negative resist on oxide, nitride on oxide, polyimide on silicon, positive resist on silicon, and positive resist on oxide.[3]
The following facts about the 210 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 210 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 210 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 210 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 210 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 210 are on record.
Answerable by: an OEM parts catalog or a service engineer
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Last updated Sep 1, 2026.