Waferpedia

Tool family

Nikon Optistation

Models in this family

  1. Nikon Optistation 3 is a wafer inspection system with cassette-to-cassette handling and a Nikon fiber illuminator.

  2. The Nikon Optistation 3100 Wafer Inspection System is a wafer inspection system from Nikon.

All entries

  1. Optistation 3 WaferNikon

    Nikon Optistation 3 is a wafer inspection system with cassette-to-cassette handling and a Nikon fiber illuminator.

    CategoryMetrology & Inspection
    2 specs
  2. Optistation 3100 WaferNikon

    The Nikon Optistation 3100 Wafer Inspection System is a wafer inspection system from Nikon.

    CategoryMetrology & Inspection
    3 specs
  3. Optistation 3200 WaferNikon
    CategoryMetrology & InspectionWaferWafer Hander:
    19 specs
  4. Optistation 7Nikon
    CategoryPrecision Optics
    8 specs