Tool family
Nikon VMZ R 3020 is a Nexiv Microscope with support for 8-inch and 12-inch wafers.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Type 1 | — | — | Standard magnification zooming head with Nikon 15× zoom optics, long working distance, wide FOV, and NA 0.35. | exceltechnologies.com[1] |
| Type 2 | — | — | Standard magnification zooming head with Nikon 15× zoom optics, long working distance, wide FOV, and NA 0.35. | exceltechnologies.com[1] |
| Type 3 | — | — | Standard magnification zooming head with Nikon 15× zoom optics, long working distance, wide FOV, and NA 0.35. | exceltechnologies.com[1] |
| Type 4 | — | — | High magnification zooming head with Nikon 15× and 120× zoom optics and NA 0.46. | exceltechnologies.com[1] |
| Type TZ | — | — | High magnification zooming head with Nikon 15× and 120× zoom optics and NA 0.46. | exceltechnologies.com[1] |
| Type A | — | — | Wide field-of-view zooming head with Nikon 10× zoom optics, widest FOV, longest working distance, and NA 0.11. | exceltechnologies.com[1] |
Nikon VMZ R 3020 CNC Video Measuring System is a CNC video measuring system with a 300 x 200 x 200 mm stroke.