Waferpedia

Tool family

OAI 806

OAILithography1 entry

The OAI 806 Mask Aligner is a precision photolithography tool for patterning substrates up to 6 inches with soft, hard, and proximity contact modes.

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Models in this family

  1. 806

    The OAI 806 Mask Aligner is a precision photolithography tool for patterning substrates up to 6 inches with soft, hard, and proximity contact modes.