Waferpedia

Tool family

Olympus OLS

Olympus2 entries
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Models in this family

  1. OLS 31 SU
  2. OLS 5100 SAF

    Olympus OLS 5100 SAF is a microscope system with high magnification, DIC, laser scanning microscopy, a motorized stage, an anti-vibration desk, and computer/software included.

All entries

  1. OLS 31 SUOlympus
    1 spec
  2. OLS 5100 SAFOlympus

    Olympus OLS 5100 SAF is a microscope system with high magnification, DIC, laser scanning microscopy, a motorized stage, an anti-vibration desk, and computer/software included.

    CategoryMetrology & Inspection
    6 specs