Waferpedia

Tool family

Olympus OLS

OlympusMetrology & Inspection2 entries
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Models in this family

  1. OLS 31 SU

    The Olympus OLS 31 SU is a Precision Optics tool in the Olympus OLS family.

  2. OLS 5100 SAF

    Olympus OLS 5100 SAF is a microscope system with high magnification, DIC, laser scanning microscopy, a motorized stage, an anti-vibration desk, and computer/software included.

All entries

  1. OLS 31 SUOlympus

    The Olympus OLS 31 SU is a Precision Optics tool in the Olympus OLS family.

    CategoryPrecision Optics
    8 specs
  2. OLS 5100 SAFOlympus

    Olympus OLS 5100 SAF is a microscope system with high magnification, DIC, laser scanning microscopy, a motorized stage, an anti-vibration desk, and computer/software included.

    CategoryMetrology & Inspection
    20 specs