Waferpedia

Tool family

Onto Innovation Vanguard

Onto Innovation2 entries
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Models in this family

  1. Vanguard S 2000 Thin Film Measurement
  2. Vanguard SpectraLASER 200 XL Film Thickness Measurement

    The ONTO / Rudolph Vanguard SpectraLASER 200 XL is a film thickness measurement system for 8-inch wafers.

All entries

  1. Vanguard S 2000 Thin Film MeasurementOnto Innovation
    4 specs
  2. Vanguard SpectraLASER 200 XL Film Thickness MeasurementOnto Innovation

    The ONTO / Rudolph Vanguard SpectraLASER 200 XL is a film thickness measurement system for 8-inch wafers.

    4 specs