Tool family
Optorun OTFC 1100 Coater.
Optorun OTFC 1100 is a coater modified from an NBPF 1 unit, with a high-speed substrate holder changed to a dome-type substrate holder and the optical monitor changed for visible wavelength.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| NBPF 1 | — | — | Modified to OTFC 1100; the high-speed substrate holder was changed to a dome-type substrate holder and the optical monitor was changed for visible wavelength. | Equipment inventory listing[1] |