Waferpedia

Tool family

Optorun OTFC 1100

Optorun1 entry

Optorun OTFC 1100 Coater.

Models in this family

  1. Optorun OTFC 1100 is a coater modified from an NBPF 1 unit, with a high-speed substrate holder changed to a dome-type substrate holder and the optical monitor changed for visible wavelength.

    Cited variants

    DesignationGenerationVintageChangesSource
    NBPF 1Modified to OTFC 1100; the high-speed substrate holder was changed to a dome-type substrate holder and the optical monitor was changed for visible wavelength.Equipment inventory listing[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing