16 entries
The Optorun OTFC 1300 is a thin film coater with an optical monitor system, quartz crystal film thickness and deposition rate monitor, electron beam and power supply, RF ion beam source, and Polycold.
Optorun OTFC 1100 is a coater modified from an NBPF 1 unit, with a high-speed substrate holder changed to a dome-type substrate holder and the optical monitor changed for visible wavelength.
The Optorun OTFC 1300 CBI is a thin film coater with center driving, a substrate dome size of φ1130 mm, EBsourcex2, a substrate heater with 350°C max, and a 60-point optical thickness monitor.