Waferpedia

Tool family

Pfeiffer ACP040G

Pfeiffer1 entry

The Pfeiffer ACP040G is identified in the source as the primary dry pump for the chamber of the EVA 451 thermal evaporator.

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Models in this family

  1. The Pfeiffer ACP040G is a dry pump used as the chamber primary pump in the pumping system of the EVA 451 thermal evaporator.