Pfeiffer

ACP040G

Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

PfeifferACP040G

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Wafer size

100mm

Vacuum

Chamber primary pump^[1]

What is it?

The source lists the Pfeiffer ACP040G as the chamber primary pump in the pumping system of the EVA 451 evaporator. No additional specifications for the ACP040G are stated in the provided source.

What can it run?

Process applications and technology nodes documented for this tool.

Pumping system for an evaporator chamber

What do the numbers mean?

Vacuum & pumping2

Role: Chamber primary pump^[1]
Pump type: Dry pump^[1]

Configuration & options1

Associated system: EVA 451 thermal evaporator^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

RoleChamber primary pump^[1]
Pump typeDry pump^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Frequently asked questions

What is the Pfeiffer ACP040G used for in this system?

It is the chamber primary pump.^[1]

What kind of process does the evaporator support?

It is dedicated to coating conductive layers to prepare non-conductive samples for e-beam exposure and avoid charging issues.^[1]

What wafer sizes are handled?

The system handles 100 mm wafers, thick 100 mm wafers using the shuttle for chips if thickness exceeds 700 µm, and 150 mm wafers.^[1]

Not publicly documented

The following facts about the ACP040G are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ACP040G are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the ACP040G are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the ACP040G are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the ACP040G are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the ACP040G is not on record.
Answerable by: an OEM datasheet or a fab qualification report