Tool family
PVA TePla 300
The PVA TePla 300 is a high-frequency plasma etch tool used for photoresist stripping, wafer surface cleaning, and hydrophilic surface enhancement.
Models in this family
The PVA TePla 300 is a high-frequency plasma etch tool used for photoresist stripping, wafer surface cleaning, and hydrophilic surface enhancement.
