Waferpedia

Tool family

SCREEN SS 3000

SCREENWet Processing / Clean2 entries
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Models in this family

  1. SS 3000 A
  2. SS 3000 AR

    SCREEN SS 3000 AR is a wet processing/clean scrubber with source-described configurations including 2F/2B, 4 Back, and HDD/no-HDD variants.

    Cited variants

    DesignationGenerationVintageChangesSource
    SCREEN / DNS SS 3000 AR - 4 Back - Includes HDD—2007Described as 4 Back and including HDD.Equipment inventory listing[1]
    SCREEN / DNS SS 3000 AR Scrubber - 2F/2B - Including HDD—2005Described as 2F/2B and including HDD.Equipment inventory listing[2]
    SCREEN / DNS SS 3000 AR Scrubber - Not including HDD—2006Described as not including HDD.Equipment inventory listing[3]
    SCREEN / DNS SS 3000 AR Scrubber - No HDD—2006Described as no HDD.Equipment inventory listing[4]

All entries

  1. SS 3000 ASCREEN
    CategoryWet Processing / Clean
    1 spec
  2. SS 3000 ARSCREEN

    SCREEN SS 3000 AR is a wet processing/clean scrubber with source-described configurations including 2F/2B, 4 Back, and HDD/no-HDD variants.

    CategoryWet Processing / Clean
    6 specs

Sources

Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing