Tool family
The Semitool 421 Scepter Spray Solvent Tool (SST) is a single-chamber batch solvent processor for wafer cleaning that processes up to 50 wafers.
The Semitool 421 Spray Solvent Tool (SST) is a batch solvent processor for wafer cleaning with an 8-inch/200mm maximum wafer size.
The Semitool 421 Scepter Spray Solvent Tool (SST) is a single-chamber batch solvent processor for wafer cleaning that processes up to 50 wafers.
The Semitool 421 Spray Solvent Tool (SST) is a batch solvent processor for wafer cleaning with an 8-inch/200mm maximum wafer size.