Waferpedia

Tool family

Semitool 421

Semitool2 entries

Models in this family

  1. The Semitool 421 Scepter Spray Solvent Tool (SST) is a single-chamber batch solvent processor for wafer cleaning that processes up to 50 wafers.

  2. The Semitool 421 Spray Solvent Tool (SST) is a batch solvent processor for wafer cleaning with an 8-inch/200mm maximum wafer size.

All entries

  1. 421 Scepter Spray SolventSemitool

    The Semitool 421 Scepter Spray Solvent Tool (SST) is a single-chamber batch solvent processor for wafer cleaning that processes up to 50 wafers.

    WaferBatch Solvent Processor for Wafer Cleaning
    3 specs
  2. 421 Spray SolventSemitool

    The Semitool 421 Spray Solvent Tool (SST) is a batch solvent processor for wafer cleaning with an 8-inch/200mm maximum wafer size.

    WaferBatch Solvent Processor for Wafer Cleaning
    7 specs