Solitec 5110 C Photoresist Spin

Models in this family

1. 

   5110 C Photoresist Spin

   The Solitec 5110 C is a photoresist spin coater for wafers, masks, and substrates.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Option A (P/N 5110C-1)	—	—	N2 spin solvent dispense; resist dispense; spread speed spin; final high speed spin.	Equipment inventory listing[1]
   Option B (P/N 5110C-2)	—	—	Resist dispense (tank required); spread speed spin; final high speed spin; spin dry (no N2).	Equipment inventory listing[1]
   Option C (P/N 5110C-3)	—	—	Solvent dispense (tank required); N2 spin; resist dispense; spread speed spin; final high speed spin.	Equipment inventory listing[1]

Sources