Solitec

5110 C Photoresist Spin

Solitec 5110 C Photoresist Spin family

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5110 C Photoresist Spin — Inventory photo — Fig. 015110 C Photoresist SpinInventory photo^[1]

Plate 01Solitec 5110C Spin Coater
Bid ServicellcWatch on YouTube
Plate 02Solitec Wafer Processing Spin Developer Model 5110-C
RGLENTERPRISESWatch on YouTube
Plate 03Solitec 5110 C T Spin Coater #61830
Bid ServicellcWatch on YouTube
Plate 04Solitec 5110C Photoresist Spinner
Bid ServicellcWatch on YouTube
Plate 05Solitec 5110 Spin Coater spincoater
Mark RichmondWatch on YouTube

Vacuum

3" Vacuum Chuck^[1]

Gas delivery

Pressurized tank required^[1]

What is it?

The Solitec 5110 C is a photoresist spin coater for wafers, masks, and substrates.

What do the numbers mean?

Vacuum & pumping2

3" Vacuum Chuck^[1]

Accurate?

Automatic Teflon diaphragm pump^[1]

Accurate?

Wafer handling2

Wafer Handling: Manual with loading paddle to center wafer^[1]
Substrate Sizes (Max): 9" Round, 6" square, 9" diagonal rectangular^[1]

Gas & chemistry3

Solvent Dispense: Pressurized tank required^[1]; Resist Dispense:^[1]; Resist coat (static or dynamic)^[1]

Optics & imaging1

Tachometer: Digital readout from optical encoder, 10 rmp resolution^[1]

Control & software4

Control Panel has 5 potentiometers for speed setting with individual 0-99.9s timers^[1]
Process Control: Digital timers with manual programming, relay logic^[1]; Speed Control:^[1]; Closed loop servo with t10 rpm speed control^[1]

Configuration & options8

OEM Operational Manuals and drawings^[1]
Acceleration: Variable from 1,000 to 40,000 rpm/sec^[1]
Time: Variable from 1 to 999 sec in 1 sec increments^[1]
With precise dispense adjustment: 0.5 to 38 mlt 1%, viscosity 4 to 10,000 centistokes^[1]; Separate drawback adjustment^[1]; Adjustable from 200 to 10,000 rpm^[1]; Digital reference on spin and spread speeds^[1]; Standard Process Sequence:^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
Option A (P/N 5110C-1)	—	—	N2 spin solvent dispense; resist dispense; spread speed spin; final high speed spin.	Equipment inventory listing^[1]
Option B (P/N 5110C-2)	—	—	Resist dispense (tank required); spread speed spin; final high speed spin; spin dry (no N2).	Equipment inventory listing^[1]
Option C (P/N 5110C-3)	—	—	Solvent dispense (tank required); N2 spin; resist dispense; spread speed spin; final high speed spin.	Equipment inventory listing^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Configuration3" Vacuum Chuck^[1]
Solvent DispensePressurized tank required^[1]
ConfigurationResist Dispense:^[1]
ConfigurationAutomatic Teflon diaphragm pump^[1]
ConfigurationResist coat (static or dynamic)^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 5110 C Photoresist Spin are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 5110 C Photoresist Spin are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 5110 C Photoresist Spin are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 5110 C Photoresist Spin are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 5110 C Photoresist Spin is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 5110 C Photoresist Spin are on record.
Answerable by: an OEM parts catalog or a service engineer