Waferpedia

Tool family

SSEC 3302 Resist Removal and Wafer

SSECWet Processing / Clean1 entry

SSEC 3302 Resist Removal and Wafer Cleaner.

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Models in this family

  1. 3302 Resist Removal and Wafer

    The SSEC 3302 is a Resist Removal and Wafer Cleaner with wafer processing modules and wafer elevators.