Waferpedia

Tool family

Strasbaugh 6 DE-DC 1

StrasbaughCMP1 entry

Strasbaugh 6 DE-DC 1 Polisher.

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Models in this family

  1. 6 DE-DC 1

    The Strasbaugh 6 DE-DC 1 is a one-spindle polisher with 12" capacity.