Waferpedia

Tool family

Strasbaugh 6 DE DC 6

StrasbaughCMP1 entry

Strasbaugh 6 DE DC 6 Polisher.

Models in this family

  1. Cited variants

    DesignationGenerationVintageChangesSource
    6 DE-DC 6Spelling variant shown in source; source also states six spindle and 12" capacity.Equipment inventory listing[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing