Waferpedia

Tool family

SUSS MicroTec AD12

SUSS MicroTec1 entry

The SUSS MicroTec AD12 is a manual system for aqueous developing and wafer cleaning, handling wafers up to 300 mm.

Models in this family

  1. The SUSS MicroTec AD12 is a manual system for aqueous developing and wafer cleaning, handling wafers up to 300 mm.