Waferpedia

Tool family

SUSS MicroTec GAMMA

SUSS MicroTec3 entries
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Models in this family

  1. Gamma 200 Spray
  2. GAMMA Resist

    The SUSS GAMMA Resist Coater is a 6-inch single block wafer coater.

  3. Gamma Spray

All entries

  1. Gamma 200 SpraySUSS MicroTec
    20 specs
  2. GAMMA ResistSUSS MicroTec

    The SUSS GAMMA Resist Coater is a 6-inch single block wafer coater.

    CategoryLithography
    1 spec
  3. Gamma SpraySUSS MicroTec
    4 specs