Waferpedia

Tool family

SVG 8626

SVG2 entries
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Models in this family

  1. 8626

    The SVG 8626 is a developer for 6-inch wafers, described as a cassette-to-cassette, 2-coat system that excludes pumps.

  2. 8626 Photoresist

    The SVG 8626 is a 6-inch cassette-to-cassette photoresist coater with a 2-coat configuration and pumps excluded.

All entries

  1. 8626SVG

    The SVG 8626 is a developer for 6-inch wafers, described as a cassette-to-cassette, 2-coat system that excludes pumps.

    3 specs
  2. 8626 PhotoresistSVG

    The SVG 8626 is a 6-inch cassette-to-cassette photoresist coater with a 2-coat configuration and pumps excluded.

    3 specs