Waferpedia

Manufacturer

SVG

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36 entries

  1. OT 7 8 9 TrackSVG
  2. OT 4 5 6 TrackSVG
  3. Rite Track 8800SVG
  4. SVG 90 S Linear Wafer TracksSVG
  5. 88SVG

    SVG 88 is a coater configured for 6-inch and 8-inch wafers.

  6. 86SVG

    The SVG 86 is a coater/developer with a track 1 sender-coat-receiver configuration and a track 2 sender-developer-receiver configuration.

  7. 8626 PhotoresistSVG

    The SVG 8626 is a 6-inch cassette-to-cassette photoresist coater with a 2-coat configuration and pumps excluded.

  8. Rite Track 8620 High Pressure SpraySVG
  9. 90 Coater Developer TrackSVG

    SVG 90 Coater / Developer Track is a semiconductor equipment model identified by SVG.

  10. Thermco 5000 DiffusionSVG
    CategoryThermal / Diffusion
  11. Thermco 5204 DiffusionSVG
    CategoryThermal / Diffusion
  12. AIO 8632 Resist / Development TrackSVG

    SVG AIO 8632 Resist / Development Track is a track system configured for coating and development with two single-dispense tracks.

  13. 661 HTSVG
    CategoryLithographyWaferMask / Wafer Handling:
  14. 90 S SpinSVG
  15. 9032 SpinSVG
  16. 300 HT LithographySVG

    The SVG / Perkin Elmer 300 HT Lithography Tool is a lithography system manufactured by SVG/Perkin Elmer.

    CategoryLithography
  17. 8632 CTD DSVG
  18. 8626 8636SVG

    The SVG 8626/8636 is a coater that supports 4-inch wafers and was introduced in 1993.

  19. 8820 TrackSVG
  20. 90 SE TrackSVG
  21. Rite Track 90 S Coater / Developer TrackSVG

    SVG Rite Track 90 S is a coater/developer track identified by model 90 S.

  22. 8836 HPO PhotoresistSVG
  23. 8620 SSC WaferSVG
    CategoryWet Processing / Clean
  24. Rite Track 8800 TrackSVG
  25. 90 SSVG
  26. 81SVG
  27. Computer Power ControlSVG
  28. Series 90 S SpreadingSVG
  29. Series 90 S Photoresist BakingSVG
  30. 8800SVG
  31. 8626SVG

    The SVG 8626 is a developer for 6-inch wafers, described as a cassette-to-cassette, 2-coat system that excludes pumps.

  32. SVG 90 Linear Wafer TracksSVG

    The SVG 90 Linear Wafer Tracks are semiconductor resist coater/developer equipment for 8-inch wafers.

  33. SVG 8800 Linear Wafer TracksSVG

    The SVG 8800 Linear Wafer Tracks are resist coater/developer equipment for 6-inch wafers.

  34. 7000SVG
    CategoryDeposition
  35. 8620 Dual Track WaferSVG
    CategoryWet Processing / Clean
  36. 8826 36 Track PhotoresistSVG