Waferpedia

Tool family

Takatori ATM

Takatori2 entries
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Models in this family

  1. ATM 1100 E

    Cited variants

    DesignationGenerationVintageChangesSource
    ATRM 2100 D———Equipment inventory listing[1]
    ATRM 2100———Equipment inventory listing[1]
    ATRM 2200 G———Equipment inventory listing[1]
  2. ATM 8100 S

All entries

  1. ATM 1100 ETakatori
    3 specs
  2. ATM 8100 STakatori
    1 spec

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing