Waferpedia

Tool family

Tegal 200

TegalDRIE1 entry

The Tegal 200 SE is a DRIE system described as suited for 3D-SiP and MEMS volume manufacturing.

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Models in this family

  1. 200

    The Tegal 200 SE is a DRIE system described as suited for 3D-SiP and MEMS volume manufacturing.

    Cited variants

    DesignationGenerationVintageChangesSource
    200 SE———web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org