Waferpedia

Tool family

Temescal 2PT

TemescalE-gun source1 entry

The Temescal 2PT is a PopTop multi-pocket e-beam source rated up to 10 kW.

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Models in this family

  1. 2PT

    The Temescal 2PT is a PopTop multi-pocket e-beam source rated up to 10 kW.

    Cited variants

    DesignationGenerationVintageChangesSource
    3PT——Rated up to 12 kW; max power 12 kW.web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org