Temescal
2PT
The Temescal 2PT is a PopTop multi-pocket e-gun source. The Temescal 2PT has a maximum power of 10 kW. The Temescal 2PT uses a pneumatically actuated PopTop crucible cover that lifts before turret rotation.[1][2][3]
How it works
The Temescal 2PT uses a movable crucible cover that rises before the crucible rotates. The Temescal 2PT uses pneumatically driven low-impact cover motion. The Temescal 2PT has a cover with a recessed lip around the exposed pocket and raised structures on the underside that interlock with crucible web walls. The Temescal 2PT is intended to provide virtual elimination of cross-contamination and reduced deposition on web walls and cover margins around the exposed pocket. The Temescal 2PT also has adjustable internal and external pole piece extensions for beam spot control and ultra-stable magnetics.[1][3]
What can it run?
Process applications and technology nodes documented for this tool.
- optical production
- microelectronic production
- specialized R&D coating
What do the numbers mean?
Power & electrical8
Vacuum & pumping5
Dimensions & facilities4
Configuration & options9
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 3PT | — | — | Rated up to 12 kW; max power 12 kW. | web.archive.org[1] |
What replaced it?
Related models
- siblingTemescal 3PT— Both are PopTop models; the source lists 2PT and 3PT as available options.source[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Rated powerup to 10 kW[1]
- Power ratings1-10 kW[1]
- Acceleration voltage4-10 kV[1]
- Operating pressuremaximum 5 x 10-4 torr; minimum 1 x 10-8 torr[1]
- Filament current70 A at 12 V ac[1]
- Emission current0-1.5 A at 4-10 kV dc (10 kW max.)[1]
- Cooling water max inlet pressure100 psi (6.89 bar)[1]
- Cooling water min delta pressure50 psi (3.45 bar)[1]
- High voltage feedthroughstwo HV feedthroughs rated for 12 kV at 70 A[1]
- Octal feedthroughone octal feedthrough rated for 110 V at 3 A per lead[1]
- Max power10 kW[1]
- Operating pressure maximum5 x 10-4 torr (6.7 x 10-4 mbar)[1]
- Operating pressure minimum1 x 10-8 torr (1.33 x 10-8 mbar)[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 2PT are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2PT are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 2PT are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 2PT are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 2PT is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 2PT are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]https://e-beam.ferrotec.com/wp-content/uploads/sites/7/Temescal-2PT-3PT-Source-Manual-RevB.pdf — e-beam.ferrotec.come-beam.ferrotec.com
- [3]https://e-beam.ferrotec.com/wp-content/uploads/sites/7/TemPTGunDS080810.pdf — e-beam.ferrotec.come-beam.ferrotec.com
Last updated Oct 17, 2026.