Waferpedia

Temescal

2PT

E-gun sourceTemescal 2PT family
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2PT — web.archive.org
Fig. 012PTweb.archive.org[1]

Power

up to 10 kW[1]

Vacuum

100 psi (6.89 bar)[1]

What is it?

The Temescal 2PT appears in the PopTop Multi-Pocket E-guns documentation as a PopTop e-beam source with a movable pneumatically actuated crucible cover designed to reduce cross-contamination. The source is identified as the Model 2PT, with stated power rating of 1-10 kW, maximum power of 10 kW, beam deflection of 270 degrees, and listed weight of 44.2 lbs (20 kg).

What can it run?

Process applications and technology nodes documented for this tool.

  • optical production
  • microelectronic production
  • specialized R&D coating

What do the numbers mean?

Power & electrical7

Rated power
up to 10 kW[1]
Accurate?
Power ratings
1-10 kW[1]
Accurate?
Acceleration voltage
4-10 kV[1]
Accurate?
Filament current
70 A at 12 V ac[1]
Accurate?
Emission current
0-1.5 A at 4-10 kV dc (10 kW max.)[1]
Accurate?
High voltage feedthroughs
two HV feedthroughs rated for 12 kV at 70 A[1]
Accurate?
Octal feedthrough
one octal feedthrough rated for 110 V at 3 A per lead[1]
Accurate?

Vacuum & pumping3

Operating pressure
maximum 5 x 10-4 torr; minimum 1 x 10-8 torr[1]
Accurate?
Cooling water max inlet pressure
100 psi (6.89 bar)[1]
Accurate?
Cooling water min delta pressure
50 psi (3.45 bar)[1]
Accurate?

Dimensions & facilities4

Weight
44.2 lbs (20 kg)[1]
Accurate?
Rotation torque
10 in. lbs (11.5 kg cm)[1]
Accurate?
Cooling water max temperature
68 F (20 C)[1]
Accurate?
Cooling water flow rate
3.0 gpm (0.19 l/sec.)[1]
Accurate?

Configuration & options8

Product line
PopTop Multi-Pocket E-gun[1]
Accurate?
Model
2PT[1]
Accurate?
Max bakeout temperature
302 F (150 C)[1]
Accurate?
Beam deflection
270 degrees[1]
Accurate?
Beam spot size/shape
from tight oval to diffuse oblong[1]
Accurate?
Sweep capability
longitudinal and lateral[1]
Accurate?
Dual pass feedthrough
one dual-pass feedthrough with 3/8-in. (9.5-mm) OD tubes[1]
Accurate?
Rotary feedthrough
one rotary-motion feedthrough with 1/4-in. (6.4-mm) dia. shaft[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
3PT——Rated up to 12 kW; max power 12 kW.web.archive.org[1]
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What replaced it?

  • siblingTemescal 3PT— Both are PopTop models; the source lists 2PT and 3PT as available options.source[1]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Rated powerup to 10 kW[1]
  • Power ratings1-10 kW[1]
  • Acceleration voltage4-10 kV[1]
  • Operating pressuremaximum 5 x 10-4 torr; minimum 1 x 10-8 torr[1]
  • Filament current70 A at 12 V ac[1]
  • Emission current0-1.5 A at 4-10 kV dc (10 kW max.)[1]
  • Cooling water max inlet pressure100 psi (6.89 bar)[1]
  • Cooling water min delta pressure50 psi (3.45 bar)[1]
  • High voltage feedthroughstwo HV feedthroughs rated for 12 kV at 70 A[1]
  • Octal feedthroughone octal feedthrough rated for 110 V at 3 A per lead[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 2PT are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2PT are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the 2PT are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 2PT are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 2PT is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the 2PT are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
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Last updated Jul 29, 2026.