Waferpedia

Tool family

Temescal 3PT

The Temescal 3PT is a PopTop multi-pocket electron-beam source rated up to 12 kW.

Models in this family

  1. The Temescal 3PT is a PopTop multi-pocket electron-beam source rated up to 12 kW.

    Cited variants

    DesignationGenerationVintageChangesSource
    2PTListed as an available option and rated up to 10 kW, compared with the 3PT rated up to 12 kW.web.archive.org[1]
    Temescal 3PT PopTop SourceBase unit, emitter assembly, spare parts kit, crucible options, and crucible cover options are listed for the 3PT PopTop source.web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org