Waferpedia

Temescal

3PT

electron beam sourceTemescal 3PT family
Research Quality: 40% complete
LinkedIn X Email
3PT — web.archive.org
Fig. 013PTweb.archive.org[1]

Power

12 kW[1]

Vacuum

100 psi (6.89 bar)[1]

What is it?

Temescal’s PopTop multi-pocket e-guns are described as electron-beam sources with a pneumatically actuated crucible cover designed to reduce cross-contamination. The 3PT model is listed as an available option and is specified with a maximum power rating of 12 kW, beam deflection of 270°, and an operating pressure range from 5 x 10-4 torr to 1 x 10-8 torr.

What can it run?

Process applications and technology nodes documented for this tool.

  • Optical coating
  • Microelectronic production
  • Specialized R&D coating

What do the numbers mean?

Power & electrical5

Maximum power
12 kW[1]
Accurate?
Acceleration voltage
4–10 kV[1]
Accurate?
Filament current
70 A at 12 V ac[1]
Accurate?
High-voltage feedthroughs
Two HV feedthroughs rated for 12 kV at 70 A[1]
Accurate?
Octal feedthrough
One octal feedthrough rated for 110 V at 3 A per lead[1]
Accurate?

Vacuum & pumping3

Operating pressure
Maximum 5 x 10-4 torr (6.7 x 10-4 mbar); minimum 1 x 10-8 torr (1.33 x 10-8 mbar)[1]
Accurate?
Cooling water max inlet pressure
100 psi (6.89 bar)[1]
Accurate?
Cooling water min delta pressure
50 psi (3.45 bar)[1]
Accurate?

Dimensions & facilities4

Rotation torque
10 in. lbs. (11.5 kg cm)[1]
Accurate?
Weight
50.3 lbs. (22.8 kg)[1]
Accurate?
Cooling water max temperature
68 °F (20 °C)[1]
Accurate?
Cooling water flow rate
3.0 gpm (0.19 l/sec.)[1]
Accurate?

Configuration & options9

Product line
PopTop Multi-Pocket E-guns[1]
Accurate?
Model
3PT[1]
Accurate?
Beam deflection
270°[1]
Accurate?
Beam spot size/shape
From tight oval to diffuse oblong[1]
Accurate?
Sweep capability
Longitudinal and lateral[1]
Accurate?
Max. bakeout temperature
302 °F (150 °C)[1]
Accurate?
Emission current
0–1.5 A at 4–10 kV dc[1]
Accurate?
Dual-pass feedthrough
One dual-pass feedthrough with 3/8-in. (9.5-mm) OD tubes[1]
Accurate?
Rotary feedthrough
One rotary-motion feedthrough with 1/4-in. (6.4-mm) dia. shaft[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
2PT——Listed as an available option and rated up to 10 kW, compared with the 3PT rated up to 12 kW.web.archive.org[1]
Temescal 3PT PopTop Source——Base unit, emitter assembly, spare parts kit, crucible options, and crucible cover options are listed for the 3PT PopTop source.web.archive.org[1]
Interested in this tool?
Embed spec card

What replaced it?

  • siblingTemescal 2PT— Both are PopTop models; the source lists 2PT and 3PT as available options.source[1]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Maximum power12 kW[1]
  • Acceleration voltage4–10 kV[1]
  • Operating pressureMaximum 5 x 10-4 torr (6.7 x 10-4 mbar); minimum 1 x 10-8 torr (1.33 x 10-8 mbar)[1]
  • Filament current70 A at 12 V ac[1]
  • Cooling water max inlet pressure100 psi (6.89 bar)[1]
  • Cooling water min delta pressure50 psi (3.45 bar)[1]
  • High-voltage feedthroughsTwo HV feedthroughs rated for 12 kV at 70 A[1]
  • Octal feedthroughOne octal feedthrough rated for 110 V at 3 A per lead[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the 3PT are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 3PT are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the 3PT are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 3PT are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 3PT is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the 3PT are on record.

    Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
Was this page accurate?

Last updated Jul 29, 2026.

Compare with similar tools

View all →
EB1Edwards

The Edwards EB1 is an ultra-compact magnetically focused electron beam source with an integral dual water feedthrough.

Categoryelectron beam source
14 specs
3PT vs EB1 →