Temescal
3PT
Temescal 3PT is a PopTop multi-pocket electron-beam source. Temescal 3PT is rated up to 12 kW. Temescal 3PT provides 270° beam deflection.[1][2][3]
How it works
Applications
The Temescal 3PT is intended for applications ranging from optical and microelectronic production to specialized research and development coating.[1][2]
- Optical coating
- Microelectronic production
- Specialized R&D coating
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Cross-contamination is described as virtually eliminated by the PopTop crucible cover design.
- Deposition on the lip of the crucible cover around the exposed pocket is described as reduced.
What do the numbers mean?
Power & electrical6
- Installation feedthroughs
- Two HV feedthroughs rated for 12 kV at 70 A; one octal feedthrough rated for 110 V at 3 A per lead; one rotary-motion feedthrough with 1/4-in. (6.4-mm) dia. shaft[1]
Vacuum & pumping4
- Operating pressure
- Maximum 5 x 10-4 torr (6.7 x 10-4 mbar); minimum 1 x 10-8 torr (1.33 x 10-8 mbar)[1]
Dimensions & facilities4
Configuration & options17
- Crucible options
- 4 x 60 cc pockets; 4 x 40 cc pockets; 6 x 25 cc pockets; 4 x 25 cc + 2 x 15 cc pockets; 5 x 25 cc + 1 x 15 cc pockets[1]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 2PT | — | — | Listed as an available option and rated up to 10 kW, compared with the 3PT rated up to 12 kW. | web.archive.org[1] |
| Temescal 3PT PopTop Source | — | — | Base unit, emitter assembly, spare parts kit, crucible options, and crucible cover options are listed for the 3PT PopTop source. | web.archive.org[1] |
| Temescal 2PT | — | — | Rated up to 10 kW; uses the PopTop source line with a different base unit and different crucible options. | web.archive.org[1] |
What replaced it?
Related models
- siblingTemescal 2PT— Both are PopTop models; the source lists 2PT and 3PT as available options.source[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Maximum power12 kW[1]
- Acceleration voltage4–10 kV[1]
- Operating pressureMaximum 5 x 10-4 torr (6.7 x 10-4 mbar); minimum 1 x 10-8 torr (1.33 x 10-8 mbar)[1]
- Filament current70 A at 12 V ac[1]
- Cooling water max inlet pressure100 psi (6.89 bar)[1]
- Cooling water min delta pressure50 psi (3.45 bar)[1]
- High-voltage feedthroughsTwo HV feedthroughs rated for 12 kV at 70 A[1]
- Octal feedthroughOne octal feedthrough rated for 110 V at 3 A per lead[1]
- Operating pressureMaximum 5 x 10^-4 torr; minimum 1 x 10^-8 torr[1]
- Installation feedthroughsTwo HV feedthroughs rated for 12 kV at 70 A; one octal feedthrough rated for 110 V at 3 A per lead; one rotary-motion feedthrough with 1/4-in. (6.4-mm) dia. shaft[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 3PT are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 3PT are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 3PT are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 3PT is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 3PT are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the 3PT are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]https://e-beam.ferrotec.com/wp-content/uploads/sites/7/TemPTGunDS080810.pdf — e-beam.ferrotec.come-beam.ferrotec.com
- [3]https://www.gambetti.it/wp-content/uploads/2018/06/TEMESCAL-Cannoni-elettronici-multicrogiuolo-2CK-3CK.pdf — gambetti.itgambetti.it
Last updated Oct 16, 2026.